Excimer laser micromachining

被引：1

作者：

Lapshin, Konstantin E. ^{[1
]}

Obidin, Alexey Z. ^{[1
]}

Vartapetov, Sergey K. ^{[1
]}

机构：

[1] RAS, Phys Instrumentat Ctr, Gen Phys Inst, Troitsk 142190, Moscow Region, Russia

来源：

ADVANCED LASER TECHNOLOGIES 2006 | 2007年 / 6606卷

关键词：

excimer laser; fused silica; PNEVA; surface structuring; microchannel; aspect ratio;

D O I：

10.1117/12.729649

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Wavelength, pulse energy, repetition rate of excimer lasers as well as beam profile and beam delivery system are highly important parameters for precision machining. In this paper we report features of our excimer lasers and excimer laser systems that have been designed for micromachining. The examples of treatment of different materials are presented. In particular, we provide some new results of microstructuring of the surface of fused silica and also formation of up to 10 mm long microchannels with extremely high aspect ratio. We discovered some liquid forming under certain circumstances due to drilling of microchannels in PMMA. This liquid remains unchanged in the microchannels after the treatment.

引用

页数：10

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