Response increase of antenna-coupled nanothermocouples by thermal insulation

被引:7
|
作者
Szakmany, Gergo P. [1 ]
Orlov, Alexei O. [1 ]
Bernstein, Gary H. [1 ]
Porod, Wolfgang [1 ]
机构
[1] Univ Notre Dame, Ctr Nano Sci & Technol, Dept Elect Engn, 275 Fitzpatirck Hall, Notre Dame, IN 46556 USA
来源
关键词
SEEBECK NANOANTENNAS; INFRARED DETECTION;
D O I
10.1116/1.5044534
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The authors present a 2.5-fold increase in the open-circuit voltage response of antenna-coupled nanothermocouples (ACNTCs) by thermally insulating them from the SiO2/Si substrate using an oxide membrane suspended over a cavity formed from the Si substrate. Polarization-dependent measurements are presented and compared to simulation results. The thermal response of the ACNTCs increases 2.5-fold when they are thermally insulated from the substrate by the cavity. The authors also show that the polarization-dependent response, and hence the polarization ratio, depends on the depth of the cavity. Published by the AVS.
引用
收藏
页数:5
相关论文
共 50 条
  • [1] Fabrication of suspended antenna-coupled nanothermocouples
    Szakmany, Gergo P.
    Orlov, Alexei O.
    Bernstein, Gary H.
    Porod, Wolfgang
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2019, 37 (05):
  • [2] Cavity-Backed Antenna-Coupled Nanothermocouples
    Gergo P. Szakmany
    Alexei O. Orlov
    Gary H. Bernstein
    Wolfgang Porod
    Scientific Reports, 9
  • [3] Cavity-Backed Antenna-Coupled Nanothermocouples
    Szakmany, Gergo P.
    Orlov, Alexei O.
    Bernstein, Gary H.
    Porod, Wolfgang
    SCIENTIFIC REPORTS, 2019, 9 (1)
  • [4] Shape engineering of antenna-coupled single-metal nanothermocouples
    Szakmany, Gergo P.
    Orlov, Alexei O.
    Bernstein, Gary H.
    Porod, Wolfgang
    INFRARED PHYSICS & TECHNOLOGY, 2015, 72 : 101 - 105
  • [5] Response Increase of IR Antenna-Coupled Thermocouple Using Impedance Matching
    Krenz, Peter M.
    Tiwari, Badri
    Szakmany, Gergo P.
    Orlov, Alexei O.
    Gonzalez, Francisco J.
    Boreman, Glenn D.
    Porod, Wolfgang
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 2012, 48 (05) : 659 - 664
  • [6] Antenna-coupled microbolometer arrays with aerogel thermal isolation
    González, FJ
    Ashley, CS
    Clem, PG
    Boreman, GD
    INFRARED PHYSICS & TECHNOLOGY, 2004, 45 (01) : 47 - 51
  • [7] ANTENNA-COUPLED THERMAL-RADIATION DETECTORS - REVIEW
    LEONOV, VN
    KHREBTOV, IA
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1993, 36 (04) : 501 - 520
  • [8] Thermal-impedance simulations of antenna-coupled microbolometers
    Gonzalez, Francisco J.
    Infrared Technology and Applications XXXII, Pts 1and 2, 2006, 6206 : D2061 - D2061
  • [9] Uncooled antenna-coupled terahertz thermal detector usingCMOSprocess
    Wang, Xu
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2021, 63 (01) : 235 - 241
  • [10] Thermal-impedance simulations of antenna-coupled microbolometers
    Gonzalez, Francisco J.
    INFRARED PHYSICS & TECHNOLOGY, 2006, 48 (03) : 223 - 226