Cross-talk simulation in CMOS micromachined gas-sensors with electrothermal actuation

被引：0
|
作者：
Roncaglia, A
Colalongo, L
Lange, D
Rudan, M
机构：
[1] Univ Bologna, DEIS, Fac Ingn, Dept Elletron, I-40136 Bologna, Italy
[2] ETH Zurich, PEL, Zurich, Switzerland
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2000年 / 69卷 / 03期
关键词：
gas sensors; CMOS technology; crosstalk; modeling;
D O I：
10.1016/S0925-4005(00)00480-9
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper reports about a device-level simulation of the capacitive crosstalk between the actuators and the sensing elements of a resonant-cantilever gas-sensor based on CMOS technology. The results are exploited to propose some improvements in the device design. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：320 / 324
页数：5
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