共 50 条
- [2] MEASURING PLATE DEFLECTIONS BY MOIRE FRINGE METHOD RUSSIAN ENGINEERING JOURNAL-USSR, 1965, 45 (10): : 45 - &
- [3] Measuring Micro Displacement Based on Moire fringe OPTOELECTRONIC IMAGING AND MULTIMEDIA TECHNOLOGY, 2010, 7850
- [4] Symmetric polarization aberration compensation method based on scalar aberration control for lithographic projection lens OPTICAL MICROLITHOGRAPHY XXV, PTS 1AND 2, 2012, 8326
- [5] A method for compensating the polarization aberration of projection optics in immersion lithography 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS, 2014, 9283
- [6] Study on the Micro Displacement Measuring System Based on Moire Fringe ISTM/2009: 8TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, 2009, : 2125 - 2128
- [7] Novel method for measuring the coma aberration of lithographic projection optics by relative image displacements at multiple illumination settings QUANTUM OPTICS, OPTICAL DATA STORAGE, AND ADVANCED MICROLITHOGRAPHY, 2008, 6827
- [10] Symmetric magnetic doublet optics with dynamically compensated field aberration for reducing image projection system Nakasuji, Mamoru, 1600, (33):