An integrated hybrid optical device for sensing applications

被引：0
|
作者：
De Stefano, L. [1 ]
Rea, I. [1 ]
Rotiroti, L. [1 ]
Fragomeni, L. [2 ]
Della Corte, F. G. [2 ]
Rendina, I. [1 ]
机构：
[1] CNR, Inst Micoelect & Microsyst, Via P Castellino 111, I-80131 Naples, Italy
[2] Mediterranea Univ Reggio Calabria, DIMET, I-89060 Reggio Di Calabria, Italy
来源：
PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 4 NO 6 | 2007年 / 4卷 / 06期
关键词：
D O I：
10.1002/pssc.200674337
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present the design and the fabrication of an integrated hybrid optical sensor for liquid and gas sensing based on the anodic bonding technique. The device is composed by three distinct elements separately realised and then joined together: a planar SOI waveguide, a porous silicon micro-chamber and a glass slide. The presence of a liquid or gaseous substance in the reaction chamber is revealed as a change in the propagation characteristic of the guided mode. In case of exposure to methanol, the preliminary experimental results show that the propagation of the laser beam, coupled into the SOI waveguide, has been efficiently modulated. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码：1946 / +
页数：2
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