Nanochannel alignment analysis by scanning transmission ion microscopy

被引:8
|
作者
Rajta, I. [1 ]
Gal, G. A. B. [1 ]
Szilasi, S. Z. [1 ]
Juhasz, Z. [1 ]
Biri, S. [1 ]
Matefi-Tempfli, M. [2 ]
Matefi-Tempfli, S. [2 ]
机构
[1] Hungarian Acad Sci, Inst Nucl Res, ATOMKI, H-4026 Debrecen, Hungary
[2] Catholic Univ Louvain, Inst Condensed Matter & Nanosci, B-1348 Louvain, Belgium
关键词
ANODIC ALUMINA FILMS; NANOWIRE ARRAYS; NANOCAPILLARIES; SILICON;
D O I
10.1088/0957-4484/21/29/295704
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper a study on the ion transmission ratio of a nanoporous alumina sample is presented. The sample was investigated by scanning transmission ion microscopy (STIM) with different beam sizes. The hexagonally close-packed Al2O3 nanocapillary array, realized as a suspended membrane of 15 mu m thickness, had pore diameters of similar to 215 nm and spacing of similar to 450 nm. When the proton beam size was limited to a single domain, a peak transmission ratio of 19% was observed as is expected from the geometry (similar to 19-20%). This result points out an almost perfectly parallel alignment of the capillaries within one domain. However, for larger beam scanning areas (sampling multiple domains) the transmission ratio was reduced to 5%. The STIM analysis over an area larger than the typical domain size revealed an overall capillary angular spread of similar to 2 degrees.
引用
收藏
页数:4
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