Piezoresistance gauge factors in heavily boron-doped polysilicon from infrared piezoreflectance

被引：0
|
作者：
Cali, J [1 ]
Bustarret, E [1 ]
Kleimann, P [1 ]
LeBerre, M [1 ]
Barbier, D [1 ]
机构：
[1] CNRS,ETUD PROPRIETES ELECT SOLIDES LAB,F-38042 GRENOBLE 9,FRANCE
来源：
POLYCRYSTALLINE THIN FILMS: STRUCTURE, TEXTURE, PROPERTIES, AND APPLICATIONS II | 1996年 / 403卷
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：609 / 614
页数：6
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