Wafer-Scale Flexible Graphene Strain Sensors

被引：0
|
作者：
Tian, He [1 ]
Yang, Yi [1 ]
Xie, Dan [1 ]
Shu, Yi [1 ]
Cui, Ya-Long [1 ]
Wu, Can [1 ]
Cai, Hua-Lin [1 ]
Ren, Tian-Ling [1 ]
机构：
[1] Tsinghua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2013年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, wafer-scale flexible strain sensors with high-performance are fabricated in one-step laser scribing. The graphene films could be obtained by direct reducing graphene oxide film in a light-scribe DVD burner. Our graphene strain sensor has the gauge factor (GF) of 0.11. In order to enhance the GF further, the graphene micro-ribbon has been used as strain sensor, which has the GF up to 9.49, which is higher than most of the reported that of graphene strain sensors (0.55 similar to 6.1). Our devices can meet the needs of specific applications, for example, high GF for low-strain applications and low GF for high deformation applications. Our work indicates that laser scribed flexible graphene strain sensors could be widely used for medical-sensing, bio-sensing, artificial skin and many other areas.
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页数：4
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