Influence of Mn-Mg co-doping on the dielectric properties of barium strontiun titanate thin film

被引：0
|
作者：
Zhou Qi-Gang [1 ]
Zhai Ji-Wei
Yao Xi
机构：
[1] Tongji Univ, Funt Mat Res Lab, Shanghai 200092, Peoples R China
[2] Leshan Teachers Coll, Dept Phys & Elect Informat Sci, Sichuan 614004, Leshan, Peoples R China
来源：
JOURNAL OF INORGANIC MATERIALS | 2007年 / 22卷 / 03期
关键词：
BST thin film; Mn-Mg co-doping; sol-gel; dielectric property;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Undoped and Mn-Mg co-doped barium strontiun titanate (Ba0.25Sr0.75TiO3) thin films were deposited on Pt/Ti/SiO2/Si substrates by a sol-gel technique. X-ray diffraction (XRD) analysis and FE-SEM reveal that the films exhibite a pure perovskite phase structure, uniform grain sizes and crack-fee. The dielectric constant, loss, tunability and leakage current density are 200, 0.010, 38%, 1 x 10(-5) A/cm(2), respectively, at a 1mol% Mn-Mg content. The improved BST thin films can be used for tunable microwave devices.
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页码：519 / 523
页数：5
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