Hollow cathode effects in the pre-breakdown phase of a pulsed capillary discharge

被引:12
|
作者
Avaria, G. [1 ]
Guzman, F. [1 ]
Ruiz, M. [1 ]
Favre, M. [1 ]
Wyndham, E. [1 ]
Bhuyan, H. [1 ]
Chuaqui, H. [1 ]
机构
[1] Pontificia Univ Catolica Chile, Dept Fis, Santiago 22, Chile
来源
PLASMA SOURCES SCIENCE & TECHNOLOGY | 2009年 / 18卷 / 04期
关键词
FINAL BREAKDOWN PHASE; GAS-FILLED CAPILLARY; IONIZATION GROWTH; LASER; LITHOGRAPHY; PERFORMANCE; EMISSION; REGION;
D O I
10.1088/0963-0252/18/4/045014
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Experimental observations of the hollow cathode effect (HCE) in an open end pulsed capillary discharge (PCD) are presented. In the HCE axial electron beams emitted from a pre-breakdown plasma produced spontaneously in the hollow cathode region (HCR) assist ionization growth in the interelectrode volume. The PCD operates in argon at 0.6-1.4 Torr, similar to 10 kV applied voltage. Time resolved spectroscopic measurements, with 15 ns time resolution, are used in conjunction with photomultiplier observations of light emission from the capillary ends, and Faraday cup measurements of axial electron beams, to characterize the pre- and post-breakdown processes in the HCR of the discharge. The HCR emission is found to be dominated by Ar II lines. Comparison between measured and synthetic spectra indicates that the pre-breakdown HCR plasma is characteristic of a collisional low pressure, low density plasma, whereas the post-breakdown HCR plasma, tens of nanoseconds after breakdown, is due to plasma ejection from the capillary volume. Experimental evidence of a zippering effect in post-breakdown capillary plasma heating, due to an initial axial pressure gradient, as predicted by computer simulations, has been found.
引用
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页数:6
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