Three-dimensional direct-write lithography into photopolymer

被引:65
|
作者
Sullivan, Amy C.
Grabowski, Matthew W.
McLeod, Robert R.
机构
[1] Univ Colorado, Dept Phys, Boulder, CO 80309 USA
[2] Univ Colorado, Dept Elect Engn, Boulder, CO 80309 USA
关键词
D O I
10.1364/AO.46.000295
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate a three-dimensional direct-write lithography system capable of writing deeply buried, localized index structures into diffusion-mediated photopolymer. The system is similar to that used for femtosecond writing in glass, but has a number of advantages including greater flexibility in the writing media and the ability to use low power, inexpensive, continuous-wave lasers. This system writes index structures both parallel and perpendicular to the writing beam in different types of photopolymers, providing control over the feature size and shape. We demonstrate that this system can be used to create single-mode waveguides that are deeply embedded in the photopolymer medium. (c) 2007 Optical Society of America
引用
收藏
页码:295 / 301
页数:7
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