A large MEMS scanning mirror for laser printing application

A state-of-the-art electrostatic scanning mirror for laser beam printing application has been developed. The large optical scanning angle of the mirror is critical for reducing the linear scanning speed variation. The geometry of the mirror increases the printing resolution and decreases the mirror dynamic deformation. Its maximum optical scanning angle range is above 96 degrees. The diameter of the mirror is as large as 4.2mm and the scanning speed is 3,000 Hz which is equivalent to a hexagonal polygon mirror rotating at 60,000 RPM. The device, coupled with a low speed scanner, is able to print on both flat and curved surfaces. It enables fast printing speed, lowers power consumption and reduces printer size for traditional print media such as paper, labels and cans as well as other applications such as raster scan display for dynamic bill board advertising with an array of such mirrors.