Fabrication of freely movable microstructures by using two-photon three-dimensional microfabrication

被引:36
|
作者
Maruo, S [1 ]
Ikuta, K [1 ]
机构
[1] Nagoya Univ, Dept Micro Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
关键词
two-photon absorption; micro stereolithography; photopolymer; movable microstructure; laser manipulation;
D O I
10.1117/12.382800
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report the latest three-dimensional (3D) fabrication system based on two-photon-initiated polymerization. In two-photon 3D microfabrication, 3D microstructures can be made by scanning an ultrashort-pulsed near-infrared laser beam inside liquid photopolymer without layer-by-layer process. Our current system has achieved lateral and depth resolutions of 0.2 mu m and 0.28 mu m, respectively. Movable micromechanisms, i.e., microgears, can be also fabricated without any use of supporting parts. For instance, a microgear (External diameter: 14 mu m) with an attached shaft was successfully fabricated. Rotation of a microgear was verified during washing out unsolidified photopolymer.
引用
收藏
页码:106 / 112
页数:7
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