100GHz Silicon-based micro-machined patch antenna and arrays

被引：0
|
作者：
Liu, Jingtian [1 ]
Chen, Shuming [1 ]
Xiao, Ke [2 ]
Chen, Xiaowen [1 ]
机构：
[1] Natl Univ Def Technol, Coll Comp, Changsha 410073, Hunan, Peoples R China
[2] Natl Univ Def Technol, Coll Elect Sci & Engn, Changsha 410073, Hunan, Peoples R China
来源：
JOURNAL OF ENGINEERING-JOE | 2019年 / 2019卷 / 19期
关键词：
microstrip antennas; antenna arrays; antenna radiation patterns; silicon; micromachining; antenna feeds; millimetre wave antennas; etching; micromachined BCB-cavity patch antenna; patches; Benzocyclobutene polymer material; silicon substrate; BCB material; four-element antenna arrays; single antenna; 2; 8 GHz impedance bandwidth; 100 GHz Silicon-based micromachined patch antenna; frequency; 100; 0; GHz; 8;
D O I：
10.1049/joe.2019.0241
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This study designs a micro-machined BCB-cavity patch antenna and two types of four-element micro-machined antenna arrays at 100GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity surrounded by metal and filled with BCB material. The BCB-cavity under patches can reduce the excitation of surface waves and enhance the radiation on performance. A single large BCB-cavity is designed to implement the four-element antenna arrays under the consideration of mutual coupling. The proposed single antenna has a 2.8GHz impedance bandwidth. At 100GHz, the simulated maximum gain is 6.7dBi for the single antenna and 13dBi for the four-element antenna arrays.
引用
收藏
页码：5622 / 5625
页数：4
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