High frequency threshold improvement of electro-static micro-relays

This paper describes one of the ways of building micromechanical threshold transducers based on unique dielectric and mechanic properties of anodic alumina (AA). Functional components of such transducers carry thin-film conductive elements formed by vacuum evaporation and are formed with Precise accuracy offered by methods of planar microelectronic technology. All structural elements of the transducers are fabricated in a single monolithic substrate, which greatly reduces errors and complexity of assembly work. The possibility is demonstrated of making micromechanical threshold transducers with universal design of converter element of anodic alumina, which ensures high sensitivity to variations in geometric size, acting force, acceleration, and temperature.