Color Image Sensor Using Stacked Organic Photoconductive Films with Transparent Readout Circuits Separated by Thin Interlayer Insulator

被引:2
|
作者
Sakai, Toshikatsu [1 ]
Seo, Hokuto [1 ]
Aihara, Satoshi [1 ]
Ohtake, Hiroshi [1 ]
Kubota, Misao [1 ]
Furuta, Mamoru [2 ]
机构
[1] NHK Sci & Technol Res Labs, Setagaya Ku, 1-10-11 Kinuta, Tokyo 1578510, Japan
[2] Kochi Univ Technol, Inst Nanotechnol, Kochi 7828502, Japan
来源
IMAGE SENSORS AND IMAGING SYSTEMS 2014 | 2014年 / 9022卷
关键词
Organic photoconductive film; stacked image sensor; a-IGZO; TFT; low temperature;
D O I
10.1117/12.2037144
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have been working on developing an image sensor with three stacked organic photoconductive films (OPFs) sensitive to only one primary color component (red-R, green-G, or blue-B); each OPF has a signal readout circuit. This type of stacked sensor is advantageous for the manufacture of compact color cameras with high-quality pictures, since color separation systems, such as prisms or color filter arrays, are eliminated because of the color selectivity of OPFs. To achieve a high-resolution stacked sensor, its total thickness should be reduced to less than 10 mu m. In this study, we fabricated a color image sensor with R and G-sensitive OPFs by applying amorphous In-Ga-Zn-O thin-film transistor (TFT) readout circuits. A 10 mu m-thick interlayer insulator separated the R and G-sensitive layers. The entire fabrication process for the device was implemented below 150 degrees C to avoid damaging the OPFs. Output signals were successfully read from each OPF through the TFT circuit, and multi-color images were reproduced from the fabricated sensor.
引用
收藏
页数:7
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