Design and fabrication of surface acoustic wave delay line for surface acoustic wave chemical-agent sensors

被引：0

作者：

Zhao, Yigui ^{[1
]}

Liu, Ming ^{[1
]}

Li, Jingjing ^{[1
]}

Niu, Jiebin ^{[1
]}

Li, Dongmei ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, Key Lab Nanofabricat & Novel Devices Integrated T, Beijing 100029, Peoples R China

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 04期

基金：

中国国家自然科学基金;

关键词：

electron beam lithography; surface acoustic wave delay lines; surface acoustic wave sensors; surface acoustic wave transducers; X-ray lithography; X-RAY-LITHOGRAPHY; ELECTRON-BEAM; DEVICE; LIMITS;

D O I：

10.1116/1.3151857

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article presents a method for designing and fabricating a surface acoustic wave (SAW) delay line for chemical-agent sensors. To improve the frequency stability and detection sensitivity, the authors designed and fabricated a SAW dual delay line with electrode-width control/single-phase unidirectional transducer and single-mode selection capability. Electron-beam direct writing lithography, x-ray lithography, and metal lift-off are applied to the fabrication of a SAW delay line with a submicron feature size. The experimental results are approximately in agreement with the design goals.

引用

页码：1821 / 1824

页数：4

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