On the Thermal Stability of PS-b-PMMA Block and P(S-r-MMA) Random Copolymers for Nanopatterning Applications

被引:43
|
作者
Gianotti, Valentina [1 ]
Antonioli, Diego [1 ]
Sparnacci, Katia [1 ]
Laus, Michele [1 ]
Giammaria, Tommaso Jacopo [2 ]
Ferrarese Lupi, Federico [2 ]
Seguini, Gabriele [2 ]
Perego, Michele [2 ]
机构
[1] Univ Piemonte Orientale, INSTM, UdR Alessandria, Dipartimento Sci & Innovaz Tecnol DISIT, I-15121 Alessandria, Italy
[2] IMM CNR, Lab MDM, I-20864 Agrate Brianza, MB, Italy
关键词
POLY(METHYL METHACRYLATE); THIN-FILMS; MICRODOMAIN ORIENTATION; GENERALIZED-APPROACH; WETTING BEHAVIOR; NEUTRAL SURFACES; DEGRADATION; POLYMER; MECHANISMS; BRUSHES;
D O I
10.1021/ma401023y
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
This study addresses the thermal stability and degradation path of symmetric and asymmetric PS-b-PMMA block copolymers, widely employed to generate templates for nanopatterned materials, and of the associated P(S-r-MMA) random copolymers, through a combination of TGA and TGA-GC-MS techniques. The monomer evolution under isothermal and dynamic conditions was able to delineate the thermal degradation characteristics of all the copolymers. Although the temperature corresponding to the maximum of the main monomer loss is similar for the random and block copolymers, the onset of the main degradation for the random copolymers is observed at a temperature about 50 degrees C lower than the one for the block copolymers. In addition, the degradation profile of the random copolymers is highly asymmetrical in the low temperature side. This is partially due to the presence of TEMPO end groups, which behave as weak links. The successive evolution of the two monomers in the random copolymers occurs in a parallel fashion, indicating the occurrence of depolymerization via an unzipping process. In contrast, in case of the block copolymers, the two chemically different blocks depolymerize at different temperatures due to their distinct thermal stabilities and different end groups nature. Considering the overall system, comprising the block copolymer film on the grafted random copolymer layer, the monomer volatilization which occurs when the random copolymer is heated at temperatures equal or above 280 degrees C, leads to a reduced control of morphology orientation in the microdomains of the block copolymer film with an eventual local detachment of the block copolymer films. These results clearly indicate that the range of accessible temperature in the processing of these self-assembling materials is mainly limited by the instability of the grafted RCP layer.
引用
收藏
页码:8224 / 8234
页数:11
相关论文
共 23 条
  • [1] Thermal Stability of Functional P(S-r-MMA) Random Copolymers for Nano lithographic Applications
    Sparnacci, Katia
    Antonioli, Diego
    Gianotti, Valentina
    Laus, Michele
    Zuccheri, Giampaolo
    Ferrarese Lupi, Federico
    Giammaria, Tommaso Jacopo
    Seguini, Gabriele
    Ceresoli, Monica
    Perego, Michele
    ACS APPLIED MATERIALS & INTERFACES, 2015, 7 (07) : 3920 - 3930
  • [2] Molar mass and composition effects on the thermal stability of functional P(S-r-MMA) random copolymers for nanolithographic applications
    Antonioli, Diego
    Gianotti, Valentina
    Sparnacci, Katia
    Laus, Michele
    Clericuzio, Marco
    Giammaria, Tommaso Jacopo
    Seguini, Gabriele
    Perego, Michele
    MOLECULAR SYSTEMS DESIGN & ENGINEERING, 2017, 2 (05): : 581 - 588
  • [3] Effect of Trapped Solvent on the Interface between PS-b-PMMA Thin Films and P(S-r-MMA) Brush Layers
    Sparnacci, Katia
    Chiarcos, Riccardo
    Gianotti, Valentina
    Laus, Michele
    Giammaria, Tommaso J.
    Perego, Michele
    Munao, Gianmarco
    Milano, Giuseppe
    De Nicola, Antonio
    Haese, Martin
    Kreuzer, Lucas P.
    Widmann, Tobias
    Mueller-Buschbaum, Peter
    ACS APPLIED MATERIALS & INTERFACES, 2020, 12 (06) : 7777 - 7787
  • [4] Chemically and structurally modified PS-b-PMMA block copolymers for lithography applications
    Zhou, Sunshine X.
    Janes, Dustin W.
    Cushen, Julia D.
    Willson, C. Grant
    Ellison, Christopher J.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2014, 247
  • [5] Effect of Entrapped Solvent on the Evolution of Lateral Order in Self-Assembled P(S-r-MMA)/PS-b-PMMA Systems with Different Thicknesses
    Giammaria, Tommaso Jacopo
    Lupi, Federico Ferrarese
    Seguini, Gabriele
    Sparnacci, Katia
    Antonioli, Diego
    Gianotti, Valentina
    Laus, Michele
    Perego, Michele
    ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (37) : 31215 - 31223
  • [6] The Limits of Lamellae-Forming PS-b-PMMA Block Copolymers for Lithography
    Wan, Lei
    Ruiz, Ricardo
    Gao, He
    Patel, Kanaiyalal C.
    Albrecht, Thomas R.
    ACS NANO, 2015, 9 (07) : 7506 - 7514
  • [7] Patterns with PS-b-PMMA block copolymer on various substrates and their applications
    Alam, Md. Mahbub
    Lee, Yu-Rim
    Jung, Woo-Gwang
    QUANTUM SENSING AND NANOPHOTONIC DEVICES VIII, 2011, 7945
  • [8] SYNTHESIS OF BLOCK COPOLYMERS OF PS-b-PMMA EMPLOYING CONTROL RADICAL POLYMERIZATION
    Hanazumi, Vivina
    Iarlori, Franco
    Ressia, Jorge A.
    Ciolino, Andres
    Valles, Enrique
    AVANCES EN CIENCIAS E INGENIERIA, 2016, 7 (03): : 21 - 30
  • [9] Dynamics of polystyrene-block-poly(methylmethacrylate) (PS-b-PMMA) diblock copolymers and PS/PMMA blends: A dielectric study
    Liu, Jin
    Guo, Hanzheng
    Pang, Xinchang
    Tan, Xiaoli
    Akinc, Mufit
    Lin, Zhiqun
    Bowler, Nicola
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2013, 359 : 27 - 32
  • [10] High Aspect Ratio PS-b-PMMA Block Copolymer Masks for Lithographic Applications
    Ferrarese Lupi, F.
    Giammaria, T. J.
    Volpe, F. G.
    Lotto, F.
    Seguini, G.
    Pivac, B.
    Laus, M.
    Perego, M.
    ACS APPLIED MATERIALS & INTERFACES, 2014, 6 (23) : 21389 - 21396