Design of a six-axis micro-scale nanopositioner -: μHexFlex

This paper presents the design of a small-scale nanopositioner, the mu HexFlex, which is comprised of a six-axis compliant mechanism and three pairs of two-axis thermo-mechanical micro-actuators. In this paper, we cover the modeling, design and fabrication of the mu HexFlex. Specific attention is given to: (1) the use of constraint-based design in generating the compliant mechanism design, (2) the modeling of the actuators, and (3) the system model which links the actuator input and mechanism response. The measured, quasi-static performance of a 3 rum diameter prototype shows a maximum range of 8.4 mu m x 12.8 mu m x 8.8 mu m and 19.2 mrad x 17.5 mrad x 33.2 mrad (1.1 degrees x 1.0 degrees x 1.9 degrees). Experimental results indicate that a constant mechanical/electrical material property system model may be used to predict the position and orientation over a range of 3.0 mu m x 4.4 mu m x 3.0 mu m and 6.3 mrad x 6.3 mrad x 8.7 mrad (0.36 degrees x 0.36 degrees x 0.5 degrees). The dynamic characteristics of the device were investigated experimentally. Experimental results show a lowest natural frequency of 4 kHz. The resolution characteristics of the device have been measured at 1 angstrom/mV The device was created using deep reactive ion etching (DRIE). Bulk fabrication costs are estimated at less than $ 2 per device. (c) 2005 Elsevier Inc. All rights reserved.