Effects of hydrogen introduction on electrical and optical properties of Cd-doped Ge oxide and Zn oxide thin films

被引：10

作者：

Arita, M ^{[1
]}

Konishi, H ^{[1
]}

Matsuda, K ^{[1
]}

Masuda, M ^{[1
]}

Hayashi, Y ^{[1
]}

机构：

[1] Kyushu Univ, Fac Engn, Dept Mat Sci & Engn, Fukuoka 8128581, Japan

来源：

MATERIALS TRANSACTIONS | 2002年 / 43卷 / 05期

关键词：

cadmium oxide; germanium oxide; zinc oxide; thin film; visible light transparency; electrical conductivity; hydrogen introduction;

D O I：

10.2320/matertrans.43.1142

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Cadmium-doped Ge oxide and Zn oxide thin films were deposited by RF magnetron sputtering. The electrical and optical properties of these films were investigated. All deposited films except for highly Cd-doped Ge oxide were transparent to visible light. Hydrogen introduction reduced the resistivity of the films, although the optical transmittance for visible light did not change significantly. The enhancement of conductivity could be attributed to the increase in carrier density by the hydrogen introduction.

引用

页码：1142 / 1145

页数：4

共 50 条

[1] Effects of hydrogen introduction on electrical and optical properties of Cd-doped Ge oxide and Zn oxide thin films
Arita, M
Konishi, H
Matsuda, K
Masuda, M
Hayashi, Y
PRICM 4: FORTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, VOLS I AND II, 2001, : 2841 - 2844
[2] HETEROEPITAXIAL GAAS ON ALUMINUM-OXIDE - FORMATION AND ELECTRICAL PROPERTIES OF ZN-DOPED AND CD-DOPED FILMS
MANASEVIT, HM
THORSEN, AC
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (01) : 99 - +
[3] Optical and electrical properties of vanadium doped Indium oxide thin films
Li, Huibin
Wang, Ning
Liu, Xingyuan
OPTICS EXPRESS, 2008, 16 (01) : 194 - 199
[4] Effects of protium introduction on electrical and optical properties of tin-germanium oxide thin films
Arita, M
Konishi, H
Masuda, M
Hayashi, Y
MATERIALS TRANSACTIONS, 2002, 43 (11) : 2670 - 2672
[5] Optical, structural and electrical properties of Mn doped tin oxide thin films
Brahma, Rajeeb
Krishna, M. Ghanashyam
Bhatnagar, A. K.
BULLETIN OF MATERIALS SCIENCE, 2006, 29 (03) : 317 - 322
[6] Electrical and optical properties of germanium-doped zinc oxide thin films
Arita, M
Yamaguchi, M
Masuda, M
MATERIALS TRANSACTIONS, 2004, 45 (11) : 3180 - 3183
[7] Optical, structural and electrical properties of Mn doped tin oxide thin films
Rajeeb Brahma
M. Ghanashyam Krishna
A. K. Bhatnagar
Bulletin of Materials Science, 2006, 29 : 317 - 322
[8] Electrical and Optical Properties of Hydrogen Doped Aluminum-Doped Zinc Oxide Thin Films for Low Cost Applications
Park, Yong Seob
Park, Young
Kwon, Samyoung
Kim, Eung Kwon
Choi, Wonseok
Kim, Donguk
Kim, Minha
Lee, Jaehyeong
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 16 (05) : 5096 - 5099
[9] Preparation of nanocrystalline Cd-doped PbS thin films and their structural and optical properties
Rajathi, S.
Kirubavathi, K.
Selvaraju, K.
JOURNAL OF TAIBAH UNIVERSITY FOR SCIENCE, 2017, 11 (06): : 1296 - 1305
[10] Hydrogen effect on the optical and electrical properties of metal oxide and nitride thin films
Hayashi, Y
INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 2006, 31 (02) : 307 - 308

← 1 2 3 4 5 →