Surface modification of 6H SiC by laser direct-write

The effect of using the laser direct-write technique to achieve resistive lines on 6H SiC was investigated. A large range of fluences was explored to determine how the laser beam affects the SiC surface during the modification process. The Focused Ion Beam (FIB) mill lift-out technique was used to obtain cross-sections of the laser written lines, and Scanning Transmission Electron Microscopy (STEM) with Energy Dispersive Spectroscopy (EDS) was used to examine the near surface microstructure after laser transformation. These techniques gave insight into the material transformation affecting the electrical resistance.