Nonlinear cancellation in weakly coupled MEMS resonators

被引:0
|
作者
Pandit, Milind [1 ]
Zhao, Chun [1 ]
Mustafazade, Aref [1 ]
Sobreviela, Guillermo [1 ]
Seshia, Ashwin A. [1 ]
机构
[1] Univ Cambridge, Dept Engn, Nanosci Ctr, 11 JJ Thomson Ave, Cambridge CB3 0FF, England
基金
英国自然环境研究理事会; “创新英国”项目;
关键词
D O I
暂无
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
For the first time, this paper demonstrates the cancellation of nonlinear response in weakly coupled resonators. It has been observed that by working in the region where the mechanical nonlinearity of the resonators and the electrical nonlinearity of the electrostatic coupling cancel, the output current amplitudes are increased by 4x while the trend of vibration amplitude variation upon stiffness perturbations is preserved as seen in the linear regime of the resonators.
引用
收藏
页码:16 / 19
页数:4
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