Design Manufacturing and Packaging of a 5-bit K-Band MEMS Phase Shifter

被引：3

作者：

Bastioli, S. ^{[1
]}

Di Maggio, F. ^{[2
]}

Farinelli, P. ^{[1
]}

Giacomozzi, F. ^{[3
]}

Margesin, B. ^{[3
]}

Ocera, A. ^{[1
]}

Pomona, I. ^{[2
]}

Russo, M. ^{[2
]}

Sorrentino, R. ^{[1
]}

机构：

[1] Univ Perugia, Elect & Informat Engn Dept, Via G Duranti 93, I-06125 Perugia, Italy

[2] Selex Commun SpA, I-95045 Misterbianco, CT, Italy

[3] IRST, FBK, MEMSRaD Res Unit, I-38050 Trento, Italy

来源：

2008 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC) | 2008年

关键词：

RF MEMS;

D O I：

10.1109/EMICC.2008.4772298

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work presents the design, manufacturing and packaging of a novel K-band 5-bit MEMS phase shifter for applications in Satellite COTM (Communication On The Move) Terminals. The first 4 bits are realized by using a switched tine topology whereas the less significant bit consists of a loaded line section. The device has been manufactured in microstrip technology on high resistivity silicon substrate by using the 8-masks FBK MEMS process. Excellent performances were measured for the MEMS switches as well as the single bits constituting the phase shifter. The phase shifter full wave simulations show excellent performance in the frequency band of interest 20.2-21.2 GHz. Return loss and insertion loss better than 17 dB and 2 dB and phase error minor than 2 degrees are obtained for all the 2(boolean AND 5) phase shifter states. The design and manufacturing of the low cost packaging solution is also presented.

引用

页码：338 / +

页数：2

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