Application of a microflown as a low-cost level sensor

被引：14

作者：

van Honschoten, J ^{[1
]}

van Baar, J ^{[1
]}

de Bree, HE ^{[1
]}

Lammerink, T ^{[1
]}

Krijnen, G ^{[1
]}

Elwenspoek, M ^{[1
]}

机构：

[1] Univ Twente, MESA Res Inst, Micromech Transducers Grp, NL-7500 AE Enschede, Netherlands

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2000年 / 10卷 / 02期

关键词：

Air - Buoyancy - Heating - Micromachining - Nusselt number - Platinum - Resistors - Scanning electron microscopy - Semiconducting silicon - Semiconductor device manufacture - Temperature measurement - Thermal conductivity of solids;

D O I：

10.1088/0960-1317/10/2/324

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present a novel 'spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures Is carried out using temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.

引用

页码：250 / 253

页数：4

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