[1] Natl Res Univ Elect Technol, Inst Adv Mat & Technol, Zelenograd 124498, Russia
[2] Sci Mfg Complex Technol Ctr, Zelenograd 124498, Russia
[3] Lodz Univ Technol, Inst Gen & Ecol Chem, PL-90924 Lodz, Poland
[4] Sci Res Inst Phys Problems, Zelenograd 124460, Russia
[5] Russian Acad Sci, Inst Nanotechnol Microelect, Moscow 119991, Russia
[6] Russian Acad Sci, Osipyan Inst Solid State Phys RAS, Chernogolovka 142432, Russia
[7] IM Sechenov First Moscow State Med Univ, Moscow 119435, Russia