Influence of Calcium on Structural and Morphological Properties of BiMnO3 Thin Films

Bi1-xCaxMnO3 (x = 0, 0.1, 0.2, 0.4) thin films were deposited on n-type silicon (100) substrate by RF magnetron sputtering. The X-ray diffraction pattern showed that the films were in monoclinic structure with C2 space group. The crystallite size and strain in the prepared films were measured by W-H plot. The surface morphology of the films was examined by atomic force microscope. The thickness of films was measured by thickness monitor in the sputtering system. From the analysis, it has been concluded that the optimum level for calcium doping is 20 at.% in the Bi site of BiMnO3 thin film, which will lead a way for further research in the Ca doped BiMnO3 system.