Formation nitride silicon on silicon in conditions of powerful laser's influence

被引：0
|
作者：
Elyutin, AV [1 ]
Manukhin, AV [1 ]
Stepanov, VA [1 ]
机构：
[1] Moscow Steel & Alloys Inst, Moscow 117936, Russia
来源：
DOKLADY AKADEMII NAUK | 1999年 / 369卷 / 06期
关键词：
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：759 / 761
页数：3
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