Research of wide range resonant pressure sensor

被引：0
|
作者：
Barauskas, D. [1 ]
Virzonis, D. [1 ]
Pelenis, D. [1 ]
Sergalis, G. [1 ]
Sapeliauskas, E. [1 ]
机构：
[1] Kaunas Univ Technol, LT-37164 Panevezys, Lithuania
来源：
INTELLIGENT TECHNOLOGIES IN LOGISTICS AND MECHATRONICS SYSTEMS - ITELMS'2015 | 2015年
关键词：
CMUT; pressure sensor; resonant sensor;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
This paper presents a research of a resonant pressure sensor that could potentially work in wide range, ranging from 10(5) Pa to 800 kPa relative to normal atmospheric pressure. A capacitive micromachined ultrasound transducer (CMUT) was designed, fabricated, assembled and tested. Experiments with the device showed that the sensitivity of the sensor in the relative pressure range from 0 to 200 kPa is up to 355 Hz/kPa.
引用
收藏
页码：51 / 55
页数：5
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