A low-cost strategy for managing tools and processes through modeling basic parameters and applying input SPC to both basic parameters and to relationships among basic parameters

被引：0

作者：

English, S ^{[1
]}

Morgan, JW ^{[1
]}

机构：

[1] STMicroelect, Phoenix, AZ USA

来源：

2004 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP: ADVANCING THE SCIENCE AND TECHNOLOGY OF SEMICONDUCTOR MANUFACTURING EXCELLENCE | 2004年

关键词：

vital signs; model-based tool management (MBTM); model-based process control (MBPQ; input statistical process control (iSPQ; SECS; automation; e-diagnostics; yield; defect density; cycle time; cost; time-to-volume; measurement; virtual sensor; predictive maintenance; metrology;

D O I：

10.1109/ASMC.2004.1309564

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：193 / 198

页数：6

共 6 条

[1] Measure of space relationships among basic and additional parameters
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[3] Investigation of Basic Parameters of Lathe Turning of Low-Machinability Steels With Cutting Tools Covered by Solid Lubricants.
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[4] RELATIONSHIPS AMONG EDDY FLUXES OF HEAT, EDDY TEMPERATURE VARIANCES AND BASIC-STATE TEMPERATURE PARAMETERS IN THERMALLY DRIVEN ROTATING FLUIDS
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BUZYNA, G
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JOURNAL OF THE ATMOSPHERIC SCIENCES, 1980, 37 (12) : 2577 - 2599
[5] Establishment of Select Printing Parameters for Low-Cost Fused Deposition Modeling Printed Cast Iron Through Experimental Optimization
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[6] Electronic module design for automatic fish breeding through multiparametric mathematical modeling that simulates necessary basic conditions for breeding in artificial ponds according to physico-chemical parameters
Diaz-Lopez, Hernan
Vargas-Gomez, Yezid
UIS INGENIERIAS, 2018, 17 (02): : 253 - 268

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