Exploring the infrared-sensing properties of polymorphous silicon-germanium (pm-SixGey:H) thin films

被引：7

作者：

Moreno, M. ^{[1
]}

Torres, A. ^{[1
]}

Calleja, C. ^{[1
]}

Ambrosio, R. ^{[2
]}

Rosales, P. ^{[1
]}

Kosarev, A. ^{[1
]}

Jimenez, R. ^{[1
]}

机构：

[1] INAOE, Puebla 72840, Mexico

[2] Ciudad Juarez Univ UACJ, Technol & Engn Inst, Chihuahua 32310, Mexico

来源：

CANADIAN JOURNAL OF PHYSICS | 2014年 / 92卷 / 7-8期

关键词：

MICRO-BOLOMETERS; SOLAR-CELLS; DEPOSITION; DETECTORS; PLASMA;

D O I：

10.1139/cjp-2013-0545

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this work we have performed an exploratory study of the infrared (IR) sensing properties of polymorphous silicon-germanium (pm-SixGey:H) thin films. Our objective was to study the characteristics that are important parameters for infrared detection, as activation energy (E-a), thermal coefficient of resistance (TCR), room temperature conductivity (sigma(RT)), and responsivity to IR radiation. After characterization, our results demonstrated that pm-SiGe:H films have advantages over a-Si:H, B, pm-Si:H, and pm-Ge:H, because of the possibility to tailor its properties as sigma(RT), E-a, and TCR, and moreover, the possibility to adjust those values for specific applications.

引用

页码：565 / 569

页数：5

共 20 条

[1] A microbolometer fabrication process using polymorphous silicon-germanium films (pm-SixGey: H) as thermosensing material
Calleja, Cesar
Torres, Alfonso
Moreno, Mario
Rosales, Pedro
Teresa Sanz-Pascua, Maria
Velazquez, Miguel
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (07): : 1864 - 1868
[2] Effect of Pressure and Flow Rates on Polymorphous Silicon-Germanium (pm-SixGe1-x:H) Thin Films for Infrared Detection Applications
Jimenez, Ricardo
Moreno, Mario
Torres, Alfonso
Rosales, Pedro
Gomez, Victor
Carlos, Netzahualcoyotl
Roca i Cabarrocas, Pere
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2018, 215 (12):
[3] Performance Characterization of Infrared Detectors Based on Polymorphous Silicon-Germanium (pm-SixGe1-x:H) Thin Films Deposited at Low Temperature
Jimenez, Ricardo
Moreno, Mario
Torres, Alfonso
Rosales, Pedro
Sanz, Maria T.
Ambrosio, Roberto
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2018, 215 (12):
[4] Study of polymorphous silicon and germanium as thermo-sensing films for infrared detectors
Moreno, M.
Torres, A.
Ambrosio, R.
Rosales, P.
Heredia, A.
Kosarev, A.
Torres, E.
Reyes-Betanzo, C.
Zuniga, C.
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2012, 358 (17) : 2336 - 2339
[5] Deep defects and their electron-capture cross sections in polymorphous silicon-germanium thin films
Meaudre, M
Gueunier-Farret, ME
Meaudre, R
Kleider, JP
Vignoli, S
Canut, B
JOURNAL OF APPLIED PHYSICS, 2005, 98 (03)
[6] The Effect of Plasma Power on the Properties of Amorphous Silicon-Germanium Thin Films
Gu, Long
Yang, Huidong
Huang, Bo
EQUIPMENT MANUFACTURING TECHNOLOGY AND AUTOMATION, PTS 1-3, 2011, 317-319 : 341 - 344
[7] Effect of pressure and temperature on the electrical properties of LPCVD silicon-germanium thin films
Guillet, D
Sarret, M
Lhermite, H
Bonnaud, O
POLYCRYSTALLINE SEMICONDUCTORS IV MATERIALS, TECHNOLOGIES AND LARGE AREA ELECTRONICS, 2001, 80-81 : 89 - 94
[8] Correlation of microstructure factor with the electronic properties of nanocrystalline silicon-germanium thin films
Dey, Amaresh
Das, Debajyoti
MATERIALS TODAY-PROCEEDINGS, 2022, 62 : 5095 - 5098
[9] Light induced degradation of hydrogenated amorphous silicon-germanium alloy (a-SiGe:H) thin films
Dönertas, ME
Günes, M
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2005, 7 (01): : 503 - 506
[10] Biocompatibility and surface properties of hydrogenated amorphous silicon-germanium thin films prepared by LF-PECVD
Huerta, F. Lopez
Garcia, R. M. Woo
Gonzalez, L. Garcia
May, A. L. Herrera
Arriaga, W. Calleja
Vega, R.
Soto, E.
2019 4TH INTERNATIONAL CONFERENCE ON ENERGY MATERIALS AND APPLICATIONS, 2019, 628

← 1 2 →