Characterization of a quasi-sinusoidal transmission grating without membrane substrate in the 200-1500 eV photon energy regions

被引：1

作者：

Wang, Chuanke ^{[1
,2
]}

Wang, Baoqing ^{[2
,3
]}

Yi, Tao ^{[2
]}

Fan, Quanping ^{[1
,2
]}

Kuang, Longyu ^{[2
]}

Li, Jin ^{[2
]}

Li, Tingshuai ^{[3
,4
]}

Zhu, Xiaoli ^{[4
]}

Liu, Shenye ^{[2
]}

Jiang, Gang ^{[1
]}

机构：

[1] Sichuan Univ, Inst Atom & Mol Phys, Chengdu 610064, Peoples R China

[2] China Acad Engn Phys, Res Ctr Laser Fus, Mianyang, Sichuan, Peoples R China

[3] Univ Elect Sci & Technol China, Sch Energy Sci & Engn, Chengdu 610054, Peoples R China

[4] Chinese Acad Sci, Inst Microelect, Beijing, Peoples R China

来源：

JOURNAL OF MODERN OPTICS | 2016年 / 63卷 / 03期

关键词：

transmission grating; X-rays; extreme ultraviolet; ELECTRON-BEAM LITHOGRAPHY; X-RAY SPECTROSCOPY; 1.5; MU-M; 1ST-ORDER GRATINGS; PHYSICS BASIS; TARGETS; SIEVES; LASERS; SPECTROMETER; IGNITION;

D O I：

10.1080/09500340.2015.1075619

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A 1000-line/mm quasi-sinusoidal transmission grating (QSTG) without membrane substrate has been designed and fabricated, which is utilized to eliminate the higher order diffraction for soft X-ray spectrum measurement in the experiments of inertial confinement fusion. The grating was calibrated using an X-ray beam on synchrotron radiation facility. It shows that the QSTG has the desired diffraction property and the higher order diffraction components are efficiently suppressed in the photon energy ranges from 200 to 1500 eV.

引用

页码：261 / 268

页数：8