Design considerations for an electrobalance microforce sensor

被引:4
|
作者
Peterson, IR
机构
[1] Nima Technology, Coventry CV4 7EZ, The Science Park
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1997年 / 68卷 / 02期
关键词
D O I
10.1063/1.1147874
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The design of two microforce sensors using the electrobalance principle and based on commercially available galvanometer units is described in detail. A plausible form for the open-loop frequency response to be expected from optical detection of the position of the meter arm is derived by analyzing the dynamics of a pivoted beam. The Nyquist criterion for stability of the feedback circuit necessary to maintain force balance over a specified range of mechanical loads is considered in the light of ease of manufacture and alignment. With both units, it was relatively easy to achieve zero static compliance and a frequency response of approximately 100 Hz with no resonant behavior. Practical aspects of friction, component variation, measurement noise, and temperature stability are discussed. (C) 1997 American Institute of Physics.
引用
收藏
页码:1130 / 1136
页数:7
相关论文
共 50 条
  • [1] Design and Construction of Microforce Sensor Calibrator
    Gazda, Piotr
    Gromelski, Wojciech
    Nowicki, Michal
    Kachniarz, Maciej
    AUTOMATION 2018: ADVANCES IN AUTOMATION, ROBOTICS AND MEASUREMENT TECHNIQUES, 2018, 743 : 731 - 738
  • [2] Design of a monolithic resonant force sensor for microforce measurements
    Béjuy B.
    Boukallel M.
    Grossard M.
    Gautier G.
    Journal Europeen des Systemes Automatises, 2010, 44 (07): : 727 - 742
  • [3] Probe-type microforce sensor for microactuators
    Onoe, Y
    Tanaami, T
    MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 : 84 - 91
  • [4] SWIR sensor design considerations
    Goss, Tristan M.
    Fourie, Henning
    Viljoen, Johan W.
    FIFTH CONFERENCE ON SENSORS, MEMS, AND ELECTRO-OPTIC SYSTEMS, 2019, 11043
  • [5] All-silicon microforce sensor for bio applications
    Stavrov, Vladimir T.
    Shulev, Assen A.
    Hardalov, Chavdar M.
    Todorov, Vencislav M.
    Roussev, Ilia R.
    SMART SENSORS, ACTUATORS, AND MEMS VI, 2013, 8763
  • [6] Design of a microforce sensor based on fixed-simply supported beam: towards realtime cell microinjection
    Zhou Yunlei
    Liu Shuang
    Yang Chongjun
    Liu Chong
    Xie Yu
    2015 IEEE INTERNATIONAL CONFERENCE ON CYBER TECHNOLOGY IN AUTOMATION, CONTROL, AND INTELLIGENT SYSTEMS (CYBER), 2015, : 1080 - 1084
  • [7] Design considerations for sensor networks with gateways
    Benmohamed, L
    Chimento, P
    Doshi, B
    Wang, IJ
    DIGITAL WIRELESS COMMUNICATIONS VII AND SPACE COMMUNICATION TECHNOLOGIES, 2005, 5819 : 249 - 260
  • [8] Design and Development of a Highly Performant 3-D Flexible Microforce Sensor for Miniature Biomedical Applications
    Zhao, Na
    Luo, Yudong
    Shen, Yantao
    IEEE SENSORS JOURNAL, 2023, 23 (04) : 3505 - 3513
  • [9] High Sensitive Microforce Measurement by a Range Variable Sensor
    Akanda, M. A. Salam
    Tohmyoh, H.
    Saka, M.
    PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 871 - 874
  • [10] CONTROL SECTION DESIGN OF A MULTICOMPONENT MICROFORCE MEASUREMENT SYSTEM
    HENDERSON, KC
    MCVEY, ES
    MOORE, JW
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1968, IM17 (02) : 122 - +