Characterization of CuInS2 thin films prepared by sputtering from binary compounds

被引:35
|
作者
Yamamoto, Y
Yamaguchi, T
Tanaka, T
Tanahashi, N
Yoshida, A
机构
[1] WAKAYAMA COLL TECHNOL,GOBO 644,JAPAN
[2] TOYOHASHI UNIV TECHNOL,TOYOHASHI,AICHI 441,JAPAN
关键词
CuInS2; sputtering; binary compounds; chalcopyrite structure;
D O I
10.1016/S0927-0248(97)00118-9
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
For fabricating more inexpensive thin film solar cells, CuInS2 thin films were prepared by RF sputtering from binary compounds (Cu2S and In2S3). From EPMA analyses, composition of the thin films was varied with changing the mixing ratio 'x' (x = [Cu2S]/[In2S3]). X-ray diffraction studies showed that the thin film sputtered from the target with the mixing ratio of x = 1.5 had a single phase with chalcopyrite structure. In this case, CuInS2 thin films showed higher optical absorption coefficients and a band gap of 1.52 eV, suitable for absorbing incident solar spectrum.
引用
收藏
页码:399 / 405
页数:7
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