Methodologies for the Assembly of a Fiber-Coupled MEMS Fourier Transform Spectrometer

This manuscript presents methodologies followed in the construction and packaging of a 3-D microelectromechanical system (MEMS) Fourier transform (FT) spectrometer based on integrated heterogeneous microassembly and packaging systems. We develop procedures, assembly, and packaging work-cells configured for sequential active alignment of miniaturized optical components. Component-to-system-level tolerance analysis is introduced to compensate for the misalignments associated. Furthermore, an inverse methodology based on the self-alignment of fibers is presented to counter the shifts resulting from the fiber packaging process.