Focused electron beam induced deposition of high resolution magnetic scanning probe tips

被引：0

作者：

Utke, I ^{[1
]}

Cicoira, F ^{[1
]}

Jaenchen, G ^{[1
]}

Hoffmann, P ^{[1
]}

Scandella, L ^{[1
]}

Dwir, B ^{[1
]}

Kapon, E ^{[1
]}

Laub, D ^{[1
]}

Buffat, P ^{[1
]}

Xanthopoulos, N ^{[1
]}

Mathieu, HJ ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, DMT, IOA, Inst Appl Opt, CH-1015 Lausanne, Switzerland

来源：

MAKING FUNCTIONAL MATERIALS WITH NANOTUBES | 2002年 / 706卷

关键词：

D O I：

暂无

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Apexes of commercial pyramidal silicon scanning microscopy tips were magnetically functionalized by means of local focused electron beam induced deposition. High aspect ratio supertips and local tip coatings with varying apex diameters can be produced by varying exposure time, beam current, and scan mode. The carbonyl precursor CO2(CO)(8) was used as source of magnetic metal. Tip performance was tested with magnetic force microscopy (tapping lift-retrace mode) and magnetically actuated cantilever atomic force microscopy. The deposit contains 34+/-2 at.% Co, dispersed as 2-5 nm metal nanocrystals in a carbonaceous matrix. Specific surface reactions and Boudouard reactions are proposed to explain the resulting deposit composition measured by Auger spectroscopy. The electrical resistivity is 10(4) higher than bulk Co resistivity.

引用

页码：307 / 312

页数：6

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