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Chongqing Technol & Business Univ, Chongqing Key Lab Coll & Univ Micronano Syst Tech, Chongqing Engn Lab Detect Control & Integrated Sy, Natl Res Base Intelligent Mfg Serv,IAMNST, Chongqing 400067, Peoples R China
Univ South Eastern Norway, Fac Technol Nat Sci & Maritime Sci, Dept Microsyst IMS, Postboks 235, N-3603 Kongsberg, Norway Chongqing Technol & Business Univ, Chongqing Key Lab Coll & Univ Micronano Syst Tech, Chongqing Engn Lab Detect Control & Integrated Sy, Natl Res Base Intelligent Mfg Serv,IAMNST, Chongqing 400067, Peoples R China