Control of Czochralski crystal growth

被引：0
|
作者：
Voigt, A [1 ]
Hoffmann, KH [1 ]
机构：
[1] Res Ctr Caesar, D-53111 Bonn, Germany
来源：
OPTIMAL CONTROL OF COMPLEX STRUCTURES | 2002年 / 139卷
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D O I：
暂无
中图分类号：
O29 [应用数学];
学科分类号：
070104 ;
摘要：
The goal of the paper is the development of proper numerical models for optimization and control of industrial crystal growth processes. To this end we concentrate on the numerical treatment, simulation and optimal control of techniques for growing high quality semiconductor crystals.
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页码：259 / 265
页数：7
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