Nearly diffraction-limited hard X-ray line focusing with hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation

被引：12

作者：

Goto, Takumi ^{[1
]}

Matsuyama, Satoshi ^{[1
]}

Hayashi, Hiroki ^{[1
]}

Yamaguchi, Hiroyuki ^{[1
]}

Sonoyama, Junki ^{[2
]}

Akiyama, Kazuteru ^{[2
]}

Nakamori, Hiroki ^{[1
,3
]}

Sano, Yasuhisa ^{[1
]}

Kohmura, Yoshiki ^{[4
]}

Yabashi, Makina ^{[4
]}

Ishikawa, Tetsuya ^{[4
]}

Yamauchi, Kazuto ^{[1
,5
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan

[2] TOYAMA, 3816-1 Kishi, Yamakita, Kanagawa 2580112, Japan

[3] JTEC Corp, 2-4-35 Saito Yamabuki, Ibaraki, Osaka 5670086, Japan

[4] RIKEN, SPring 8, 1-1-1 Kouto, Sayo, Hyogo 6795198, Japan

[5] Osaka Univ, Grad Sch Engn, Ctr Ultra Precis Sci & Technol, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan

来源：

OPTICS EXPRESS | 2018年 / 26卷 / 13期

关键词：

OPTICS; INTERFEROMETRY;

D O I：

10.1364/OE.26.017477

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We have developed the new hybrid adaptive X-ray mirror based on mechanical and piezo-driven deformation to realize precise shape controllability on a long-length mirror. The mechanical bender approximately provides the required ellipse, while the piezoelectric actuators attached to the mirror correct very small residual errors to satisfy the diffraction-limited condition The mechanical bender significantly reduces the role of the piezoelectric actuator, resulting in the suppression of accuracy degradation due to the drift and/or junction effect of the piezoelectric actuators. In addition, line focusing was demonstrated with two different numerical apertures at SPring-8, and the obtained beam sizes were 127 and 253 nm (FWHM), which agree well with the diffraction-limited sizes. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：17477 / 17486

页数：10

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