Design and fabrication of a novel optically readable thermal imaging system based on MEMS technology

A novel optically readable infrared thermal imaging system that directly translates infrared image into visible image by using optically readable technology was presented. Its key part is a Fabry-Perot Micro-Cavity Infrared Detector Array (F-P MCIRDA) based on MEMS (micro-electro-mechanical system) technology. Maximal thermo-mechanical, opto-mechanical sensitivity and temperature response of the movable micromirror are 6.47 x 10(-9) m/K, 1.53 x 10(8) m(-1) and 2.05 x 10(-4), respectively, as theoretical analysis results for bi-material Au/SiNx. System noise analysis indicates that the NETD of the present design and the expected limit of the NETD are 5.1 K and 58mK, respectively. A 50 x 50 F-P MCIRDA has been successfully fabricated by using bulk MEMS technology. The initial measurement results indicate that obvious displacement of the moveable micromirrors can be observed as the infrared radiation irradiates on. The operating principle of this system is verified successfully.