Integrated uncooled array IR sensors

被引：7
|
作者：
Pevtsov, EP
Elkin, EG
Pospelova, MA
机构：
来源：
THIRD CONFERENCE ON PHOTONIC SYSTEMS FOR ECOLOGICAL MONITORING | 1997年 / 3200卷
关键词：
pyroelectric films; uncooled array sensors; MEMS technology;
D O I：
10.1117/12.284744
中图分类号：
X [环境科学、安全科学];
学科分类号：
08 ; 0830 ;
摘要：
Technologies enabling low-dissipation designs for uncooled array IR sensors are offered. The technique involves the etching of special buffer layers from under a 1-mu m membrane followed by deposition of an IR-sensitive film and electrode structure. The electrical and physical properties of plumbum-zirconate-titanate (PZT), barium titanate (BaTiO3), tetraaminodiphenyl (TADPh), polyvinylidene fluoride (PVDF) pyroelectric films are compared. A circuit for sensing pyroelectric signals in a CCD is considered.
引用
收藏
页码：179 / 182
页数：4
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