Atomic Layer Deposition of SnO2 for Selective Room Temperature Low ppb Level O3 Sensing

被引：22
|
作者：
Mills, Steven [1 ]
Lim, Michael [1 ]
Lee, Bongmook [1 ]
Misra, Veena [1 ]
机构：
[1] N Carolina State Univ, Dept Elect & Comp Engn, Raleigh, NC 27695 USA
来源：
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2015年 / 4卷 / 10期
基金：
美国国家科学基金会;
关键词：
OZONE; OXIDE; FILMS; SENSORS; RESISTANCE;
D O I：
10.1149/2.0111510jss
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 mu W making them well suited for real time, portable environmental monitoring systems. (C) The Author(s) 2015. Published by ECS. All rights reserved.
引用
收藏
页码：S3059 / S3061
页数：3
相关论文
共 50 条
  • [1] Atomic layer deposition of SnO2 on In2O3 enables ultrasensitive NO2 detection at room temperature and DFT mechanism research
    Wang, Qiumei
    Zhou, Lihao
    Li, Shaobo
    Chang, Xiao
    Liu, Xianghong
    Zhang, Jun
    APPLIED SURFACE SCIENCE, 2023, 640
  • [2] Room-Temperature Atomic Layer Deposition of SnO2 Using Tetramethyltin and Its Application to TFT Fabrication
    Tokoro, Kentaro
    Saito, Shunsuke
    Kanomata, Kensaku
    Miura, Masanori
    Ahmmad, Bashir
    Kubota, Shigeru
    Hirose, Fumihiko
    IEICE TRANSACTIONS ON ELECTRONICS, 2018, E101C (05): : 317 - 322
  • [3] Non-Aqueous Atomic Layer Deposition of SnO2 for Gas Sensing Application
    Marichy, C.
    Silva, R. M.
    Pinna, N.
    Willinger, M-G
    Donato, N.
    Neri, G.
    ATOMIC LAYER DEPOSITION APPLICATIONS 14, 2018, 86 (06): : 55 - 65
  • [4] Boosting room-temperature ppb-level NO2 sensing over reduced graphene oxide by co-decoration of α-Fe2O3 and SnO2 nanocrystals
    Zhang, Yaqing
    Yang, Zhimin
    Zhao, Liang
    Fei, Teng
    Liu, Sen
    Zhang, Tong
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2022, 612 : 689 - 700
  • [5] Effect of SnO2 particle size on gas-sensing performance for ppb-level NO2 at room temperature under UV light
    Li, Yang
    Li, Lili
    Zhang, Ranran
    Ying, Zhihua
    Zhou, Yang
    Wu, Wei
    Wang, Gaofeng
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (03)
  • [6] Properties of SnO2 Films Grown by Atomic Layer Deposition
    Cheng, Hsyi-En
    Tian, De-Cih
    Huang, Kuan-Chun
    IUMRS INTERNATIONAL CONFERENCE IN ASIA 2011, 2012, 36 : 510 - 515
  • [7] ppb level triethylamine detection of yolk-shell SnO2/Au/Fe2O3 nanoboxes at low-temperature
    Liu, Lu
    Zhao, Yuetong
    Song, Peng
    Yang, Zhongxi
    Wang, Qi
    APPLIED SURFACE SCIENCE, 2019, 476 : 391 - 401
  • [8] Gas sensing properties of epitaxial SnO2 thin films prepared by atomic layer deposition
    Rosenthal, A
    Tarre, A
    Gerst, A
    Sundqvist, J
    Hårsta, A
    Aidla, A
    Aarik, J
    Sammelselg, V
    Uustare, T
    SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) : 552 - 555
  • [9] Effect of SnO2 particle size on gas-sensing performance for ppb-level NO2 at room temperature under UV light
    Yang Li
    Lili Li
    Ranran Zhang
    Zhihua Ying
    Yang Zhou
    Wei Wu
    Gaofeng Wang
    Journal of Materials Science: Materials in Electronics, 2024, 35
  • [10] Atomic-layer chemical Vapor deposition of SnO2 for gas-sensing applications
    Rosental, A
    Tarre, A
    Gerst, A
    Uustare, T
    Sammelselg, V
    SENSORS AND ACTUATORS B-CHEMICAL, 2001, 77 (1-2) : 297 - 300
12345