Raman spectroscopy of amorphous diamond films

The ion energy is a crucial parameter for amorphous diamond films deposition. Amorphous diamond films (a-D) were prepared by magnetic field filtered plasma stream system. The Raman spectroscopy and surface morphology of a-D films deposited at various substrate bias voltages V-b were studied. The results show that a-D films, deposited at V-b, in the range from -10V to -50V, have a single and nearly symmetric very broad Raman peak range from 1200cm(-1) to 1800cm(-1). The surface morphology of these films is very smooth and uniform. However, for samples deposited at Vb > -10V or Vb, < -50V, the Raman spectra exhibit two broad peaks centered approximately at 1350cm(-1)(D peak) and 1580cm(-1)(G peak), and the surface roughness will be increases.