Methane Conversion in a N2-CH4 Radiofrequency Discharge

被引:7
|
作者
Gautier, Thomas [1 ,2 ]
Carrasco, Nathalie [1 ,3 ]
Stefanovic, Ilija [4 ]
Sikimic, Brankica [2 ]
Cernogora, Guy [1 ]
Winter, Joerg [2 ]
机构
[1] Univ Versailles St Quentin, CNRS, LATMOS, F-78280 Guyancourt, France
[2] Ruhr Univ Bochum, D-44780 Bochum, Germany
[3] Inst Univ France, F-75005 Paris, France
[4] Univ Belgrade, Inst Phys, Belgrade 11000, Serbia
关键词
ATR; FT-IR; cold plasma; mass spectrometry; methane; nitrogen; TITANS THOLINS PRODUCTION; ABSORPTION-SPECTROSCOPY; INFRARED-ABSORPTION; PLASMA; NANOPARTICLES; ATMOSPHERE; ANALOG; DUST;
D O I
10.1002/ppap.201300158
中图分类号
O59 [应用物理学];
学科分类号
摘要
The carbon conversion in a N2CH4 radiofrequency (RF) discharge is investigated by analyzing both the gas phase and the dust produced. HCN is identified as the main reactive product and both HCN and NH3 are quantified. This quantification allows determining the carbon conversion yield from CH4 to HCN, which appears to be surprisingly low. The comparison of the infrared absorbance spectra between dust produced in two similar RF plasma setups emphasizes small differences on the CH3/CH2 bonds ratio in the samples. This difference is explained by the aging processes of dust within the plasma.
引用
收藏
页码:472 / 481
页数:10
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