High speed, lateral PIN photodiodes in silicon technologies

被引:6
|
作者
Schaub, JD [1 ]
Koester, SJ [1 ]
Dehlinger, G [1 ]
Ouyang, QC [1 ]
Guckenberger, D [1 ]
Yang, M [1 ]
Rogers, D [1 ]
Chu, J [1 ]
Grill, A [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
来源
SEMICONDUCTOR PHOTODETECTORS | 2004年 / 5353卷
关键词
photodetectors; PIN photodiodes; optical receivers; integrated optoelectronics; silicon;
D O I
10.1117/12.530237
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
High speed, efficient photodetectors are difficult to fabricate in standard silicon fabrication processes due to the long absorption length of silicon. However, high performance servers will soon require dense optical interconnects with low cost and high reliability, and this trend favors monolithic silicon receivers over hybrid counterparts. Recently, lateral PIN photodiode structures have been demonstrated in silicon CMOS technology with little or no process modifications. Optical receivers based on these detectors have achieved record performance in terms of speed and sensitivity. This paper will discuss the advantages, issues and recent advances in silicon-based photodetectors and optical receivers. This includes the fastest photodetector ever implemented in a standard bulk CMOS process, a 13.9 Gb/s lateral trench detector implemented in a modified EDRAM process, and a >15 GHz; pure germanium photodiode grown directly on a silicon substrate.
引用
收藏
页码:1 / 11
页数:11
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