Numerical simulations of vibration in phase-shifting interferometry

被引：53
|
作者：
deGroot, PJ
Deck, LL
机构：
[1] Zygo Corporation, Middlefield, CT, 06455, Laurel Brook Road
来源：
APPLIED OPTICS | 1996年 / 35卷 / 13期
关键词：
D O I：
10.1364/AO.35.002172
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Computer simulations predict the expected rms measurement error in a phase-shifting interferometer in the presence of mechanical vibrations. The simulations involve a numerical resolution of a nonlinear mathematical model and are performed over a range of vibrational frequencies and amplitudes for three different phase-shift algorithms. Experimental research with an interference microscope and comparison with analytical solutions verify the numerical model. (C) 1996 Optical Society of America
引用
收藏
页码：2172 / 2178
页数：7
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