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- [2] Influence of substrate bias voltage on the properties of CNx films prepared by reactive magnetron sputtering JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1999, 17 (03): : 899 - 908
- [4] Influence of The Substrate Bias Voltage on The Structure of Rutile TiO2 Films Prepared by Dual Cathode DC Unbalanced Magnetron Sputtering BIOMATERIALS AND APPLICATIONS, 2012, 506 : 82 - +
- [5] Effect of Substrate Bias on the Properties of Craln Films Prepared by High Power Pulsed Magnetron Sputtering Zhongguo Biaomian Gongcheng/China Surface Engineering, 2022, 35 (05): : 200 - 209
- [6] Influence of substrate temperature on the TiC thin films prepared by unbalanced magnetron sputtering method Transactions of the Korean Institute of Electrical Engineers, 2013, 62 (02): : 284 - 287
- [7] Influence of the distance between target and substrate on the properties of TGZO films prepared by DC magnetron sputtering OPTOELECTRONIC MATERIALS, PTS 1AND 2, 2010, 663-665 : 572 - 575
- [8] Effects of magnetic flux density and substrate bias voltage on Ni films prepared on a flexible substrate material using unbalanced magnetron sputtering assisted by inductively coupled plasma JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2014, 32 (02):