A silicon-based yield gain evaluation methodology for embedded-SRAMs with different redundancy scenarios

被引:4
|
作者
Rondey, E [1 ]
Tellier, Y [1 ]
Borri, S [1 ]
机构
[1] Altis Semicond, F-91105 Corbeil Essonnes, France
关键词
D O I
10.1109/MTDT.2002.1029764
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Yield improvement is an essential issue for modem high-volume manufacturing CMOS processes. Process yield is particularly low for area-critical designs, such as embedded memories. The use of redundancy structures which replace faulty memory locations with good ones, has a direct impact on the final chip yield. This paper describes an experimental methodology employed to evaluate the yield gain associated with different redundancy approaches and shows how this method can be applied to determine the optimal redundancy configuration which maximizes the number of good dies per wafer, depending on the embedded memory requirements of a specific product.
引用
收藏
页码:57 / 61
页数:5
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