Stitching interferometry: Side effects and PSD

被引:8
|
作者
Bray, M [1 ]
机构
[1] MB Opt, F-75012 Paris, France
来源
关键词
stitching interferometry; interferometry; optical metrology; wavefront propagation; Power Spectral Density (PSD);
D O I
10.1117/12.369222
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Stitching Interferometry is rapidly emerging as an alternative to Standard Interferometry, in the measurement of Large Optics - such as those found in Laser MegaJoule and NIF. Stitching Interferometry involves multiple overlapping subaperture measurements over large components, and a computer software to reconstruct the wavefronts. Obviously, the Stitching Interferometer's measurement characteristics have to be different to those of the Standard Interferometer of same nominal measurement area. Two questions emerge: a - What metric do we choose to express these characteristics ? b - How does Stitching Interferometry compare to Standard Interferometry, using this metric ? We choose to use the PSD to illustrate hen, Stitching Interferometry of large components compares with Standard Large-Size Interferometry, for various lateral scales. Also, we highlight some important characteristics of Stitching Interferometry, which arise from judicious use of the particular configuration of the device. Ignorance of basic propagation phenomena can lead to bad design of the Stitching Interferometer, and loss of any performance advantage over Standard Interferometry. Because many of these effects are not direct consequences of the Stitching process, we call them side effects. In this paper, we provide basic explanation, and keep the mathematics to a low profile - indeed, it is not necessary to actually compute anything to understand the effects. However, some very basic formulas, a few numerical tables and lots of graphs are presented, in order to provide basis for discussion.
引用
收藏
页码:443 / 452
页数:4
相关论文
共 50 条
  • [1] Stitching interferometry: Principles and algorithms
    Fan, YJ
    Velzel, CHF
    Struik, KG
    Schellekens, PHJ
    17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2, 1996, 2778 : 1062 - 1063
  • [2] Stitching interferometry of cylindrical surface
    Chen, Dingfu
    Yin, Zhijun
    Chen, Zhu
    Valyukh, Sergiy
    Yu, Yingjie
    OPTICS AND LASERS IN ENGINEERING, 2022, 157
  • [3] Stitching interferometry of aspherical surfaces
    Hänsel, T
    Nickel, A
    Schindler, A
    OPTICAL METROLOGY ROADMAP FOR THE SEMICONDUCTOR, OPTICAL, AND DATA STORAGE INDUSTRIES II, 2001, 4449 : 265 - 275
  • [4] Power spectral density(PSD) in stitching interferometer
    Yu, YJ
    Li, GP
    SURFACE SCATTERING AND DIFFRACTION FOR ADVANCED METROLOGY II, 2002, 4780 : 126 - 137
  • [5] Is PSD-95 entangled in the side effects of antidepressants?
    Stachowicz, Katarzyna
    NEUROCHEMISTRY INTERNATIONAL, 2022, 159
  • [6] Stitching interferometry for the measurement of aspheric surfaces
    Fan, YJ
    Struik, KG
    Mulders, PC
    Velzel, CHF
    CIRP ANNALS 1997 MANUFACTURING TECHNOLOGY, VOLUME 46/1/1997: ANNALS OF THE INTERNATIONAL INSTITUTION FOR PRODUCTION ENGINEERING RESEARCH, 1997, 46 : 459 - 462
  • [7] Sphericity Measurement Using Stitching Interferometry
    Hagino, Takeshi
    Yokoyama, Yuichiro
    Kuriyama, Yutaka
    Haitjema, Han
    EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 2012, 523-524 : 883 - +
  • [8] Micro-stitching interferometry at the ESRF
    Rommeveaux, Amparo
    Barrett, Raymond
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 616 (2-3): : 183 - 187
  • [9] Local subaperture compensation and stitching interferometry
    Xie, Lingbo
    Wang, Zhen
    Hu, Yao
    Hao, Qun
    AOPC 2020: OPTICS ULTRA PRECISION MANUFACTURING AND TESTING, 2020, 11568
  • [10] Stitching algorithm for annular subaperture interferometry
    侯溪
    伍凡
    杨力
    吴时彬
    陈强
    ChineseOpticsLetters, 2006, (04) : 211 - 214