Combined PIC-MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

被引：23

作者：

Schweigert, IV ^{[1
]}

Schweigert, VA ^{[1
]}

机构：

[1] Inst Theoret & Appl Mech, Novosibirsk 630090, Russia

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2004年 / 13卷 / 02期

关键词：

D O I：

10.1088/0963-0252/13/2/018

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

A new combined particle-in-cell Monte Carlo collisions (PIC-MCC) approach has been developed for accurate and fast simulation of a radio frequency (rf) discharge at a low gas pressure and high plasma density. Test calculations of heating mode transition in a capacitively coupled rf discharge in helium and argon show a good agreement with experimental data. We demonstrate a high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating.

引用

页码：315 / 320

页数：6

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