Nickel sputtering by high-energy heavy ions

被引：3
|
作者：
Didyk, AY [1 ]
Semina, VK
Khalil, A
Vasil'ev, NA
Stepanov, AÉ
Suvorov, AL
Cheblukov, YN
机构：
[1] Joint Inst Nucl Res, Flerov Lab Nucl React, Dubna 141980, Moscow Oblast, Russia
[2] State Res Ctr Russian Federat, Inst Theoret & Expt Phys, Moscow 117259, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2000年 / 26卷 / 01期
关键词：
Radiation; Experimental Data; Nickel; Energy Loss; Crystal Lattice;
D O I：
10.1134/1.1262736
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Recent experimental data on the sputtering of coarse-grained metals by high-energy heavy ions are reviewed. It is pointed out that inelastic energy losses of ions have rather insignificant effect on the sputtering yield of metals. Experimental data on the sputtering of nickel by Kr-86(+) ions are presented. The accumulation of radiation defects in the crystal lattice of nickel in the course of irradiation leads to an increase in the metal sputtering yield from the surface of grains, making it comparable with the sputtering yield from the intergranular region. The results of such experiments are important for development of the heavy ion acceleration facilities and for the high-energy heavy-ion doping of deep layers in semiconductors. (C) 2000 MAIK "Nauka/Interperiodica".
引用
收藏
页码：46 / 48
页数：3
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